90?m ceramic interdigital electrode IDE capacitor array humidity sensor chip 5mm*6mm
1. Base material: Alumina ceramics; Dimensions: 5mm*6mm.
2. Line width: 90um, line spacing: 90um, finger length 3.8mm.
Number of interdigitated pairs: 9 pairs (18 fingers).
3. Metal layer structure: Ti/cu/Ni/Au, thickness: 0.1um, 5um, 4um, 1um respectively.
4. Applicable temperature: -150?~350?.
5. Large pad, easy to operate.
1. Packing: 1PC
2. Warranty period: 120 days